Meet the people

Ian Mihailovic and Lalit Kumar working in a lab — Ian Mihailovic and Lalit Kumar (Photograph: D-MAVT/Alessandro Della Bella)

Turning nanoscale properties into functions

To characterize highly-sensitive sensor systems for use in environmental monitoring and medical applications, Lalit Kumar and Ian Mihailovic conduct part of their measurements in a vacuum sealed low-noise microprobe setup. The Micro- and Nanosystems Group is dedicated to bringing new functionalities to micro- and nanoscale devices by exploiting the properties of nanostructured materials, focusing on sensing applications for zero power sensor systems and the internet-of-things. The current research encompasses the use of carbon nanotubes for gas sensing and resonators, as well as thermoelectric devices and microelectromechanical systems, fabricated by state of the art equipment and processes in ETH Zurich’s cleanrooms.

1. S. Eberle, C. Roman, C. Hierold, “Effect of varying gate distance on the threshold voltage shift in carbon nanotube field effect transistor gas sensors”, Microelectronic Engineering 193, 86-90 http://dx.doi.org/10.1016/j.mee.2018.02.027, 2018
2. L. Kumar, L.V. Jenni, M. Haluska, C. Roman, C. Hierold, “Mechanical stress relaxation in adhesively clamped carbon nanotube resonators”, AIP Advances 8 (2), 025118, http://dx.doi.org/10.1063/1.5020704 , 20182.
3. M. Müller, V. Maiwald, L. Thiele, J. Beutel, C. Roman, C. Hierold, “Two-level bulk microfabrication of a mechanical broadband vibration amplitude-amplifier with ten coupled resonators”, Journal of Micromechanics and Microengineering 28 (4), 045009,
http://dx.doi.org/10.1088/1361-6439/aaabf6, 2018
4. M. Thielen, G. Kara, I. Unkovic, D. Majoe, C. Hierold, “Thermal Harvesting Potential of the Human Body”, Journal of Electronic Materials, 1-7, http://dx.doi.org/10.1007/s11664-018-6095-y, 2018
5. K. Chikkadi, M. Muoth, V. Maiwald, C. Roman, and C. Hierold, “Ultra-low operation of self-heated, suspended carbon nanotube gas sensors," Applied Physics Letters, Appl. Phys. Lett. 103, 223109 (2013); http://dx.doi.org/10.1063/1.4836415 , 27 November 2013.
6. M. Muoth, T. Helbling, L. Durrer, S.-W. Lee, C. Roman, C. Hierold, “Hysteresis-free operation of suspended carbon nanotube transistors”, Nature Nanotechnology http://dx.doi.org/10.1038/nnano.2010.129 ; http://www.nature.com/doifinder/10.1038/nnano.2010.129, July 4, 2010
7. W. Glatz, E. Schwyter, L. Durrer, and C. Hierold, "Bi2Te3 Based, Flexible Micro Thermoelectric Generator with Optimized Design," Journal of Microelectromechanical Systems, 18, 3, pp.763-772, http://dx.doi.org/10.1109/JMEMS.2009.2021104, 2009